(EC En-Me En) Microelectromechanical Systems (MEMS)

(EC En-Me En) Microelectromechanical Systems (MEMS)
Design, fabrication, and applications of MEMS. Mechanical properties governing their design and reliability and the processing technologies used to fabricate them.
 Hours3.0 Credit, 3.0 Lecture, 0.0 Lab
 PrerequisitesEC En 450 or Me En 372 or equivalent.
 TaughtWinter odd years
Course Outcomes

Mechanical Performance

1. Use mechanics principles to analyze the mechanical performance of microsystems.

Tools and Processes

2. Be familiar with the tools and processes used in micromaching of microelectromechanical systems (MEMS).

Analyze and Design

3. Use principles of physics to analyze and design MEMS, including sensors and actuators.